发明名称 RESIN SUBSTRATE WITH SUPPORT SUBSTRATE AND PRODUCTION METHOD THEREOF, AND ELECTRONIC DEVICE USING RESIN SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a resin substrate with a support substrate in which troubles do not occur during the peeling of the resin substrate even when a mechanical peeling method is used, by focusing on the C=O bond of the resin substrate and lowering the adhesive strength between the support substrate and the resin substrate.SOLUTION: There is provided a resin substrate with a support substrate including a support substrate 2, a release layer 3 disposed on the support substrate 2 and comprising metal oxide, and a resin substrate 4 disposed on the release layer 3, and in which the resin material constituting the resin substrate 4 comprises C=O bond and, in the resin substrate 4, the abundance ratio of C=O bond of the rear surface region R on the side in contact with the release layer 3 is lower than the abundance ratio of C=O bond of the front surface region F on the side opposite to the release layer 3.
申请公布号 JP2016005899(A) 申请公布日期 2016.01.14
申请号 JP20150098076 申请日期 2015.05.13
申请人 PANASONIC IP MANAGEMENT CORP 发明人 TANAKA YUJI
分类号 B32B7/06;G02F1/13;G09F9/00;G09F9/30;H01L21/02;H01L27/12;H01L27/32;H01L51/50;H05B33/02;H05B33/10 主分类号 B32B7/06
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