VOID-ARRANGED STRUCTURE AND MEASUREMENT METHOD USING THE SAME

摘要

A void-arranged structure that includes a pair of principal surfaces opposing each other and a plurality of void sections that penetrate through the pair of principal surfaces. The void-arranged structure is configured of a plurality of unit structures each of which includes a first void section and a second void section having a different shape from a shape of the first void section, and the overall shape of the unit structure, when the principal surface is viewed from above, is not mirror-symmetric with respect to a predetermined imaginary plane orthogonal to the principal surface of the void-arranged structure.

主权项

1. A void-arranged structure comprising:
a pair of principal surfaces opposing each other; and a plurality of unit structures each of which has a same shape and includes at least two void sections aligned at a predetermined interval, which are connected two-dimensionally and periodically along a direction of a first principal surface of the pair of principal surfaces, and wherein the void sections penetrate through the pair of principal surfaces, wherein each unit structure of the plurality of unit structures includes a first void section and a second void section having a different shape from a shape of the first void section, and an overall shape of each unit structure, when viewed from the first principal surface, is not mirror-symmetric with respect to a predetermined imaginary plane orthogonal to the first principal surface of the void-arranged structure.