| 发明名称 |
INTERFEROMETRIC ENCODERS USING SPECTRAL ANALYSIS |
| 摘要 |
Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength. |
| 申请公布号 |
US2016011016(A1) |
申请公布日期 |
2016.01.14 |
| 申请号 |
US201514798910 |
申请日期 |
2015.07.14 |
| 申请人 |
Zygo Corporation |
发明人 |
Deck Leslie L.;Liesener Jan |
| 分类号 |
G01D5/347;G01B9/02 |
主分类号 |
G01D5/347 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for determining information about a degree of freedom of rigid body motion of an encoder scale, the method comprising:
directing a first beam and a second beam along different paths, wherein the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with the second beam to form an interfering output beam; monitoring the interference in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength. |
| 地址 |
Middlefield CT US |
