ACTUATOR, POSITIONING DEVICE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING AN ACTUATOR

摘要

An actuator (51) comprises: coil assemblies (60) arranged in an array, wherein each coil assembly defines a core chamber (61) having a core chamber height (61d); and at least one magnetic member (62) that extends partly along the core chamber height of the core chamber of a corresponding at least one coil assembly, wherein the at least one magnetic member is made of a magnetic material. At least one of a shape of the at least one magnetic member, a size of the at least one magnetic member, a position of the at least one magnetic member and the magnetic material of the at least one magnetic member may be selected so as to control one or more parameters of the actuator.