发明名称 MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION
摘要 Disclosed is a mask frame assembly for thin film deposition. The present invention comprises: a mask frame which has an opening formed therein and surrounds the opening; a mask which is installed on the mask frame; and a support which crosses the opening to support the mask. The support comprises: a support body; one or more ribs which are formed in the support body; and one or more pattern portions which are formed between the ribs and have spaces.
申请公布号 KR20160005272(A) 申请公布日期 2016.01.14
申请号 KR20140083896 申请日期 2014.07.04
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KWEN, HA NUL;KIM, JUNG HOON;KIM, HAN YOUNG;ROH, YOUNG HOON;JUNG, WOO YOUNG;JEONG, CHEOL GYU;JI, PIL SEON;HONG, JAE MIN
分类号 H01L21/027;G03F9/00;H01L21/02;H01L27/32 主分类号 H01L21/027
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