发明名称 |
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF THE SAME AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which achieves less occupied area; or provide a semiconductor device which achieves high integration degree; or provide a semiconductor device which achieves high productivity.SOLUTION: An integrated circuit manufacturing method comprises the steps of: forming af first insulation film on a p-type transistor, and a transistor using an oxide semiconductor on the first insulation film, and a second insulation film on the transistor; forming in the fist insulation film and the second insulation film, an opening, that is, a contact hole having the oxide semiconductor of the transistor on part of a sidewall; and forming an electrode for connecting the p-type transistor and the transistor using the oxide semiconductor. |
申请公布号 |
JP2016006857(A) |
申请公布日期 |
2016.01.14 |
申请号 |
JP20150100280 |
申请日期 |
2015.05.15 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;MIYAIRI HIDEKAZU;SASAGAWA SHINYA |
分类号 |
H01L21/768;G02F1/1368;H01L21/28;H01L21/336;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/8247;H01L23/522;H01L27/06;H01L27/088;H01L27/092;H01L27/10;H01L27/108;H01L27/115;H01L29/417;H01L29/423;H01L29/49;H01L29/786;H01L29/788;H01L29/792 |
主分类号 |
H01L21/768 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|