发明名称 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF THE SAME AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which achieves less occupied area; or provide a semiconductor device which achieves high integration degree; or provide a semiconductor device which achieves high productivity.SOLUTION: An integrated circuit manufacturing method comprises the steps of: forming af first insulation film on a p-type transistor, and a transistor using an oxide semiconductor on the first insulation film, and a second insulation film on the transistor; forming in the fist insulation film and the second insulation film, an opening, that is, a contact hole having the oxide semiconductor of the transistor on part of a sidewall; and forming an electrode for connecting the p-type transistor and the transistor using the oxide semiconductor.
申请公布号 JP2016006857(A) 申请公布日期 2016.01.14
申请号 JP20150100280 申请日期 2015.05.15
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;MIYAIRI HIDEKAZU;SASAGAWA SHINYA
分类号 H01L21/768;G02F1/1368;H01L21/28;H01L21/336;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/8247;H01L23/522;H01L27/06;H01L27/088;H01L27/092;H01L27/10;H01L27/108;H01L27/115;H01L29/417;H01L29/423;H01L29/49;H01L29/786;H01L29/788;H01L29/792 主分类号 H01L21/768
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