发明名称 METHOD FOR SURFACE TREATMENT AND DEVICE THEREOF
摘要 <p>PURPOSE:To improve the efficiency of the titled treatment by a method wherein, in the case where treatment vessels are provided in an interconnected manner, a treatment solution is replaced for each unit treatment vessels successively, and the material to be treated is dipped into the unit treatment vessel for which treatment solution is not replaced at that point of time. CONSTITUTION:The treatment solution compounded in a compounding vessel M1 is fed to unit treatment vessels P1A and P1B respectively through the intermediaries of electromagnetic valves 1a and 1b. Also, the used treatment solution is drained from the bottom parts of the vessels P1A and P1B through electromagnetic valves 2a and 2b. These electromagnetic valves are controlled by a control circuit 3. The treatment solution is replaced in the vessels P1A and P1B mutually by the circuit 3 and the lot to be processed is dipped into the vessel wherein new treatment solution is fed.</p>
申请公布号 JPS6278826(A) 申请公布日期 1987.04.11
申请号 JP19850219867 申请日期 1985.10.01
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KOBAYASHI JUNRO;YAMADA HIROMASA;AKAO KIYOSHI
分类号 H01L21/306;B05D1/18;H01L21/00;H01L21/304;H01L21/67;H01L21/677 主分类号 H01L21/306
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