发明名称 |
OPERATING PLATFORM |
摘要 |
An operating platform. The operating platform comprises a first sensor group (40) and a gas supply device (30). The gas supply device (30) comprises a second sensor group (303) used for detecting the moisture content and oxygen content in protecting gas input through a gas inlet (301) and a first solenoid valve (304). A group of sensors is added to detect the moisture or oxygen content in the protecting gas provided by the gas supply device (30) so as to solve the technical problems that the detecting result is inaccurate and causes of anomalies are uneasy to be found and removed. |
申请公布号 |
WO2016004660(A1) |
申请公布日期 |
2016.01.14 |
申请号 |
WO2014CN83580 |
申请日期 |
2014.08.01 |
申请人 |
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
ZHANG, FAN;YU, WEI |
分类号 |
H01L51/56;B01D46/00;B01D49/00 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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