| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique which compensates for time delay of a measurement value of a coolant temperature sensor arranged so as not to be in contact with a coolant.SOLUTION: A liquid cooling cooler for cooling a semiconductor element comprises: a first temperature sensor which measures the temperature of the semiconductor element; a second temperature sensor which is attached to a cooler housing so as not to be in contact with a liquid coolant; and a compensator. The compensator stores the time constant at the time when modeling a transfer function of the heat from the coolant to the second temperature sensor with a primary delay system, estimates the heat quantity of the semiconductor element from the current flowing in the semiconductor element, estimates the amount of change in the coolant temperature in a period of the time constant from the estimated heat quantity and the measurement value of the first temperature sensor, and outputs a value obtained by adding the estimated amount of change to the measurement value of the second temperature sensor as a coolant temperature after compensation. |
