| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a crystal device which improves productivity by forming a predetermined metal pattern on a side surface of a crystal piece part in the state of a crystal wafer and stably forming a connection part for connecting a lead-out part that is formed on a principal surface of the crystal piece part, with a stationary part.SOLUTION: The crystal wafer is formed, and a crystal piece part 121 which is fixed at one predetermined side is formed in the crystal wafer. Next, while using a photolithography technique and an etching technique, a first excitation electrode 123a, a first wiring part 124a, a first lead-out part 125a, a second excitation electrode 123b, a second wiring part 124b, a second lead-out part 125b and a first stationary part 126 are formed on both principal surfaces of the crystal piece part 121 and then, while using a deposition technique or a sputtering technique, a first connection part 127 is formed on a top surface, a bottom surface and side surfaces of the crystal piece part 121. The crystal piece part 121 is diced thereafter and packaged on a substrate, and the packaged crystal piece part 121 is hermetically encapsulated by the substrate and a lid. |
