| 发明名称 |
SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS |
| 摘要 |
Systems and methods for producing energetic neutrals include a remote plasma generator configured to generate plasma in a plasma region. An ion extractor is configured to extract high energy ions from the plasma. A substrate support is arranged in a processing chamber and is configured to support a substrate. A neutral extractor and gas dispersion device is arranged between the plasma region and the substrate support. The neutral extractor and gas dispersion device is configured to extract energetic neutrals from the high energy ions, to supply the energetic neutrals to the substrate and to disperse precursor gas into the processing chamber. |
| 申请公布号 |
US2016013020(A1) |
申请公布日期 |
2016.01.14 |
| 申请号 |
US201514740469 |
申请日期 |
2015.06.16 |
| 申请人 |
Lam Research Corporation |
发明人 |
Ashtiani Kaihan;Lai Canfeng;Meng Liang |
| 分类号 |
H01J37/32;C23C16/458;C23C16/52;C23C16/46;C23C16/503;C23C16/455;C23C16/50 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system for producing energetic neutrals, comprising:
a remote plasma generator configured to generate plasma in a plasma region; an ion extractor configured to extract high energy ions from the plasma; a processing chamber; a substrate support arranged in the processing chamber and configured to support a substrate; and a neutral extractor and gas dispersion device arranged between the plasma region and the substrate support, wherein the neutral extractor and gas dispersion device is configured to extract energetic neutrals from the high energy ions, to supply the energetic neutrals to the substrate and to disperse precursor gas into the processing chamber. |
| 地址 |
Fremont CA US |
