| 摘要 |
PURPOSE:To obtain a durable and moisture resistant light receiving body having stable characteristics by laminating two a-Si layers contg. different kinds of atoms selected among O, C and N on a support having a large number of hemispherical dents. CONSTITUTION:Rigid spheres are naturally dropped on the surface of a metallic support 101 to make the surface uneven by the traces of the spheres having >=0.035 ratio of D/R (D is <500mum width and R is curvature). Two a-Si layers 102, 103 contg. uni formly different kinds of atoms selected among O, C and N are laminated on the support 101. When the layer 102 is formed as an electrically conductive layer and/or a conductivity controlling layer, 1X10<-1>-2X10<-2>atom ppm O, C or N is distributed in the whole region of the layer 102. When the concn. is made higher on the support 101 side, a layer inhibiting the implantation of electric charges is formed. A barrier layer of an insulator may be formed in place of the inhibiting layer or a multilayered structure consisting of both the layers may be provided. The layer 103 contg. 10-80atom% O, C or N is laminated on the layer 102 so as to improve the moisture resistance and durability. The generation of interference fringes is prevented by the prescribed unevenness of the support in an image forming process and a light receiving body 100 giving a high quality image is obtd. |
