发明名称 VALVE, FLUID DEVICE, METHOD FOR CONTROLLING FLUID, AND METHOD FOR MANUFACTURING VALVE
摘要 A valve (400) is provided with a tubular structure comprising an outer tube (410) and an inner tube (420), and a diaphragm member comprising: a thin film (430) disposed so as to cover a portion of the inner tube (420), and an anchor part (440) that encircles the peripheral edge of the thin film (430) and is adhered along an inner wall (415) of the outer tube (410) and an outer wall (426) of the inner tube (420).
申请公布号 WO2016006615(A1) 申请公布日期 2016.01.14
申请号 WO2015JP69572 申请日期 2015.07.07
申请人 THE UNIVERSITY OF TOKYO;NIKON CORPORATION 发明人 ICHIKI TAKANORI;TERANE SHOUTAROU;SUZUKI KUNO
分类号 F16K7/17;B81B3/00;B81C1/00 主分类号 F16K7/17
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