| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate electrolytic treatment apparatus capable of making an electric field shield ratio uniform without increasing the size of the substrate electrolytic treatment apparatus.SOLUTION: A substrate electrolytic treatment apparatus comprises: a treatment tank 1 holding treatment liquid; a substrate holder 8 which holds a substrate W and arranges the substrate W in the treatment tank 1; a counter electrode 2 which is arranged in the treatment tank 1 and is a counter electrode of the substrate W; and a paddle 16 which is arranged between the counter electrode 2 and the substrate W and performs reciprocating movement in parallel with the surface of the substrate W to agitate the treatment liquid. The paddle 16 comprises: a plurality of agitation rods arranged in inner regions R1 of the paddle 16; and a plurality of agitation rods arranged in outer regions R2 of the paddle. A gap between the agitation rods arranged in the outer regions R2 is smaller than a gap between the agitation rods arranged in the inner regions R1. |
