WAFER LEVEL SPECTROMETER

摘要

A sensor apparatus has a substrate and a spectrally selective detection system, and a cover. The spectrally sensitive detection system is sandwiched between the substrate and the cover. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors located within the substrate. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

主权项

1. A sensor apparatus, comprising:
a) a substrate; b) a spectrally selective detection system that includes a generally laminar array of optical wavelength selectors optically coupled to a corresponding array of optical detectors located within the substrate; c) a cover, wherein the spectrally sensitive detection system is sandwiched between the substrate and the cover.