| 摘要 |
PURPOSE:To enable a device to perform high accurate further high speed positioning of a moving table in a short time, by providing the moving table and a counterweight so as to be moved in a reverse direction by a link mechanism. CONSTITUTION:A device mounts a moving table 11 and a counterweight 12 to upper and bottom nodes of a link mechanism connecting four links 15 into a tetragonal shape by the nodes 10. Internal threads of the right and left nodes are meshed with a feed thread 13 reversely threading its right and left parts. The device turns the thread 13 by a motor 17, lowering the counterweight 12 while lifting the table 11. In this way, the device, performing the compensation for gravity of the table 11, enables positioning of the table to be high accurately performed in a short time. |
