发明名称 ESD保護デバイスおよび方法
摘要 <p>An electrostatic discharge (ESD) protection clamp (21, 21′, 70, 700) for protecting associated devices or circuits (24), comprises a bipolar transistors (21, 21′, 70, 700) in which doping of facing base (75) and collector (86) regions is arranged so that avalanche breakdown occurs preferentially within a portion (84, 85) of the base region (74, 75) of the device (70, 700) away from the overlying dielectric-semiconductor interface (791). Maximum variations (ΔVt1)MAX of ESD triggering voltage Vt1 as a function of base-collector spacing dimensions D due, for example, to different azimuthal orientations of transistors (21, 21′, 70, 700) on a semiconductor die or wafer is much reduced. Triggering voltage consistency and manufacturing yield are improved.</p>
申请公布号 JP5843323(B2) 申请公布日期 2016.01.13
申请号 JP20120550023 申请日期 2011.01.06
申请人 フリースケール セミコンダクター インコーポレイテッド 发明人 ジェンドロン、アモーリー;ギル、チャイ イーアン;ホン、チャンス
分类号 H01L21/331;H01L21/822;H01L27/04;H01L27/06;H01L29/732 主分类号 H01L21/331
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