| 摘要 |
<p>A surface emitting laser element includes a light emission part (100a) having a mesa structure. The light emission part includes a lower reflector (103), a resonator structure including an active layer (105) and an upper reflector (107). The lower reflector, the resonator structure and the upper reflector are laminated on a substrate (101). A peripheral part of a top surface of the mesa structure is covered by a dielectric layer (111a) that has a tapered surface such that a thickness decreases in a direction toward an outermost part, a taper angle (´) of the tapered surface with respect to a surface of the substrate is smaller than a slope angle (¸) of a side wall of the mesa structure with respect to the surface of the substrate, and an end part of the dielectric layer coincides with an end part of the upper reflector.</p> |
