发明名称 マスクケースのマスク係止具
摘要 <p>The invention aims at providing a photomask clamper of photomask box. The photomask clamper of the photomask box is used for storing or transporting photomask substrates in the photomask box. The photomask clamper is disposed in the photomask box firmly and is capable of not contacting with a photomask face. And the photomask clamp can prevent the generation of static electricity caused by the damges or shifts of the photomask. The photomask clamper of the photomask box provided by the invention includes resin substrates mixed with carbon. The resin substrates are arranged in the four corners on the inner surface of the photomask box. The substrates are provided with branch parts through bending arms. The branch parts are provided with projection parts in the direction of the upper surface and inclination face arranged on one sides of the projection parts. The photomask is carried on the branch parts by the inclination faces through edge lines of the photomask. And the bending arms bend downward, thereby retaining the photomask with elastic forces.</p>
申请公布号 JP5843190(B2) 申请公布日期 2016.01.13
申请号 JP20110144096 申请日期 2011.06.29
申请人 株式会社荒川樹脂 发明人 斎藤 森作;大塚 忠三郎;伊藤 好久
分类号 G03F1/66 主分类号 G03F1/66
代理机构 代理人
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