发明名称 ヒートスプレッダ及びその製造方法、半導体装置、電子装置
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a heat spreader ensuring sufficient thermal diffusion effect. <P>SOLUTION: The heat spreader 6 comprises: a metal layer 6A; and a diamond piece 6B provided on at least one surface of the metal layer 6A and exposed to the surface. The surface (bottom face) of the heat spreader 6 where the diamond piece 6B is exposed is connected thermally to the surface of a semiconductor chip. Since diamond has extremely high heat conductivity, heat conductivity increases extremely in the in-plane direction on the surface of the heat spreader 6 connected with the semiconductor chip, and thereby sufficient thermal diffusion effect is obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5842457(B2) 申请公布日期 2016.01.13
申请号 JP20110178427 申请日期 2011.08.17
申请人 富士通株式会社 发明人 林 信幸;米田 泰博;中西 輝;森田 将
分类号 H01L23/36;H01L23/373 主分类号 H01L23/36
代理机构 代理人
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