| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a crystal solar cell capable of preventing a conductive part (low resistance region) from being formed in an end surface of a substrate without need of laser irradiation. <P>SOLUTION: A manufacturing method for a crystal solar cell including a crystal substrate which expresses a photoelectric conversion function between a light-receiving surface which receives light and a rear surface facing the light-receiving surface comprises successively at least: a first step of implanting a phosphorus (P) ion into one principal surface side of a plate-like base substance composed of a single crystal silicon or a polycrystal silicon using the base substance as the crystal substrate; a second step of removing a coating stuck to the end surface part of the base substance in the first step and composed of a phosphorus (P) by evaporating the coating by performing heat treatment with respect to the base substance; and a third step of performing annealing treatment with respect to the base substance. <P>COPYRIGHT: (C)2013,JPO&INPIT |
