| 摘要 |
A scanning mechanism (10) includes a fixing frame (11), an XY stage (13) including an XY movable portion (14) movable in the X and Y directions, and piezoelectric elements (12A, 12B) constituting an XY actuator to scan the XY movable portion (14) in the X and Y directions. The scanning mechanism (10) also includes a piezoelectric element (21) held by the XY movable portion (14), a holder (22) held by the piezoelectric element (21), and a cantilever (23) held by the holder (22). The piezoelectric element (21) constitutes a Z actuator to scan the cantilever (23) in the Z direction. The scanning mechanism (10) further includes a light condensing portion (25) held by the XY movable portion (14). The light condensing portion (25) operates to cause light for detecting the displacement of the cantilever (23) to enter the cantilever (23). The piezoelectric element (21) and light condensing portion (25) are arranged side by side in projection to the X-Y plane. |
