コバルト膜形成用原料及び当該原料を用いたコバルト含有薄膜の製造方法,申请号JP20120058799-传众专利搜索

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发明名称	コバルト膜形成用原料及び当該原料を用いたコバルト含有薄膜の製造方法
摘要
申请公布号	JP5842687(B2)	申请公布日期	2016.01.13
申请号	JP20120058799	申请日期	2012.03.15
申请人	宇部興産株式会社	发明人	白井昌志;二瓶央;立沢将城
分类号	C23C16/18;C07F15/06	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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