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发明名称
Apparatus for processing materials in a controlled atmosphere
摘要
申请公布号
US3294670(A)
申请公布日期
1966.12.27
申请号
US19630314412
申请日期
1963.10.07
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
CHARSCHAN SIDNEY S.;WESTGAARD HARALD
分类号
C23C14/56;H01J37/34
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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