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发明名称
ガスパージ装置及び該ガスパージ装置を有するロードポート装置
摘要
申请公布号
JP5842628(B2)
申请公布日期
2016.01.13
申请号
JP20120012731
申请日期
2012.01.25
申请人
ＴＤＫ株式会社
发明人
江本 淳;阿部 知史
分类号
H01L21/677
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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