发明名称 ACTUATING AN OPTICAL FIBER WITH A PIEZOELECTRIC ACTUATOR AND DETECTING VOLTAGES GENERATED BY THE PIEZOELECTRIC ACTUATOR
摘要 A method of one aspect may include actuating a cantilevered optical fiber by mechanically deforming a piezoelectric actuator. An electrical signal generated as a result of mechanical deformation of the piezoelectric actuator may also be detected.
申请公布号 EP2179454(B1) 申请公布日期 2016.01.13
申请号 EP20070811086 申请日期 2007.08.06
申请人 UNIVERSITY OF WASHINGTON 发明人 MELVILLE, CHARLES, DAVID
分类号 H01L41/04;G02B26/10;H01L41/09 主分类号 H01L41/04
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