| 摘要 |
<p>The present invention addresses the problem of providing a manufacturing device that is capable of continuously producing organic EL elements even when an abnormality occurs in a transfer chamber. The manufacturing device has multiple film-forming stationary chambers (4) and moving chambers (2, 3). The multiple station chambers (4) are each equipped with a vacuum chamber (12s), a vacuum pump (39) and doors (25, 26), and a predetermined film can be vapor deposited on a glass substrate (20) inside the vacuum chamber (12s). The moving chambers (2, 3) are equipped with a vacuum chamber (2h), a vacuum pump (39) and doors (25, 26), have the ability to move, and have the ability to transfer the glass substrate (20). The film-forming stationary chamber (4) and the moving chambers (2, 3) can be joined together and separated. Multiple film-forming stationary chambers (4) are arranged side by side in a line. The moving chambers (2, 3) are able to link the vacuum chambers (2h, 12s) by joining with a film-forming stationary chamber (4) and opening the doors (25, 26), and the glass substrate (20) can be passed between a film-forming stationary chamber (4) and a moving chamber (2).</p> |
