发明名称 |
WAFER FOR IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME |
摘要 |
The present invention suggests a wafer for an image sensor and a method of manufacturing the same. The wafer for an image sensor includes a substrate; a gettering layer which is formed by injecting hydrogen ions into the substrate, and getters metal impurities; and an epitaxial layer formed on a surface of the substrate. The gettering layer is formed by injecting hydrogen ions of which a dosed amount is 1×10^(15) to 1×10^(16) ions/cm^2. |
申请公布号 |
KR20160004900(A) |
申请公布日期 |
2016.01.13 |
申请号 |
KR20150011073 |
申请日期 |
2015.01.23 |
申请人 |
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
PARK, JEA GUN;KIM, IL HWAN |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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