| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an adhesive having antistatic properties which does not cause deterioration in yield due to adsorption of foreign matter and is suitable for forming an adhesive layer onto the lower end face of a pellicle frame. <P>SOLUTION: The antistatic adhesive is obtained by blending a silicone adhesive, an acrylic adhesive or the like with an ionic antistatic agent such as a lithium salt. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
