发明名称 拭き取りパッド及びこのパッドを用いたノズルメンテナンス装置並びに塗布処理装置
摘要 A wiping pad includes: a scraping edge provided to cross a long side direction of a discharge port and come into contact with the discharge port and nozzle side surfaces, and a lead-out passage provided ahead of the scraping edge in a moving direction along a nozzle long side direction to drain a treatment solution scraped away with the scraping edge, wherein the lead-out passage is a V-shaped groove formed along the moving direction on a pad upper surface side, and the V-shaped groove has the scraping edge formed at a rear end edge portion thereof and is formed to gradually increase in groove width and depth toward a front thereof from the scraping edge.
申请公布号 JP5841449(B2) 申请公布日期 2016.01.13
申请号 JP20120026822 申请日期 2012.02.10
申请人 東京エレクトロン株式会社 发明人 稲益 寿史;小笠原 幸雄;田代 佳
分类号 H01L21/027;B05C5/02;B05C11/10 主分类号 H01L21/027
代理机构 代理人
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