| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a solar cell having improved output characteristics. <P>SOLUTION: A solar cell manufacturing method comprises: forming i-type semiconductor layers 12, 14 on substrates 10 fixed to a tray 20; subsequently performing a semiconductor layer formation process of forming semiconductor layers 11, 13 each doped with a dopant; and bombarding, after the semiconductor layer formation process, at least one of hydrogen radicals and hydrogen ions on the tray 20. <P>COPYRIGHT: (C)2013,JPO&INPIT |
