发明名称 エンコーダ装置、及び駆動装置
摘要 <p><P>PROBLEM TO BE SOLVED: To improve the detection accuracy of an encoder device. <P>SOLUTION: The encoder device includes: a detection unit which outputs a signal corresponding to a position of a driven body; a storage unit where correction value information for correcting first position information indicating a position is stored; and a signal processing unit which generates the first position information on the basis of the signal corresponding to the position of the driven body and corrects the generated first position information on the basis of the correction value information read out from the storage unit. The correction value information is information generated on the basis of error characteristics indicating errors of measured position information correspondingly to positions and has information where, with respect to each of boundaries of a plurality of divided sections in prescribed position information, into which the error characteristics are divided, error information generated by averaging approximate values on the boundary which are generated on the basis of error characteristics in sections before and after the boundary and second position information indicating the position of the boundary are associated with each other. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5842334(B2) 申请公布日期 2016.01.13
申请号 JP20110024036 申请日期 2011.02.07
申请人 株式会社ニコン 发明人 今井 亨;高橋 喜二;山邉 基一郎
分类号 G01D5/244 主分类号 G01D5/244
代理机构 代理人
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