发明名称 |
METHOD AND DEVICE FOR MEASURING THERMOELECTRIC CHARACTERISTICS OF COMBINATORIAL SPECIMEN |
摘要 |
<p>The present invention provides a method and device for measuring thermoelectric characteristics of a combinatorial sample, wherein the method and device are useful for rapid sample evaluation, the investigation of thermoelectric materials, and the carrier control of semiconductors. <??>The device includes combinatorial samples (10) patterned with a metal mask, a pair of sample holders (11 and 12) for applying a small temperature gradient to the sample (10), a thermocouple (14) for measuring the temperature gradient, and a probe pin array (15) in contact with the sample (10). <IMAGE></p> |
申请公布号 |
EP1400804(B1) |
申请公布日期 |
2016.01.13 |
申请号 |
EP20020705181 |
申请日期 |
2002.03.14 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
KOINUMA, HIDEOMI;KAWAJI, HITOSHI;ITAKA, KENJI;MINAMI, HIDEKI |
分类号 |
G01N27/00;G01N27/04;G01K7/02;G01N25/00;G01N37/00;G01R31/26;H01L21/66;H01L35/34 |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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