| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask capable of suppressing damage to a surface of a substrate as a film deposition object while maintaining a function as a mask when forming a thin film by a CVD method or ALD method, and a method of manufacturing a display panel.SOLUTION: A mask 3 has an opposite surface 18 opposed to an upper surface of an EL substrate 2 when mounted on the EL substrate 2, and the opposite surface 18 is divided into a contact surface part 181 and a set-back surface part 182 set on an inner peripheral side thereof. The set-back surface part 182 has its surface position set back in a Z direction on the basis of a surface position of the contact surface part 181. The contact surface part 181 is an area which comes into contact with an outer peripheral part upper surface of the EL substrate 2 when the mask 3 is mounted on the EL substrate 2, and which is opposed to an outer peripheral part where a lead-out wiring layer 112 is absent on the upper surface of the EL substrate 2. On the other hand, an area, opposed to a terminal part 43 of the lead-out wiring layer 112, in the opposite surface 18 is the set-back surface part 182. |
