| 摘要 |
PROBLEM TO BE SOLVED: To provide a desmearing device capable of surely performing desmearing with high processing efficiency, and a desmearing method.SOLUTION: In accordance with the desmearing method, a workpiece disposed within a processing space in a processing chamber is desmeared by irradiating the workpiece with a vacuum ultraviolet ray from an ultraviolet ray source via a window member having ultraviolet ray permeability, the ultraviolet ray source being accommodated in a light radiation chamber where an internal space is separated from the processing space by the window member. The desmearing method includes supplying a processing gas containing moisture into the processing space, the processing gas containing an active species source to be activated by being irradiated with the vacuum ultraviolet ray. The desmearing device includes processing gas supply means including a humidification mechanism for containing the moisture in the processing gas containing the active species source to be activated by the vacuum ultraviolet ray from the ultraviolet ray source. |
