| 摘要 |
1,064,897. Capacitors. HUGHES AIRCRAFT CO. April 13, 1965 [April 21, 1964], No. 18662/65. Heading H1M. A thin film capacitor comprises a metallic layer of tantalum or niobium deposited by hydrogen reduction of the pentachloride vapour at 650-800‹ C., annealing the film, depositing a dielectric film of the metal pentoxide by oxidation by gaseous oxygen at 150-300‹ C.; and depositing thereon and annealing a second layer of tantalum or niobium; the metal entering any pin holes in the oxide film and reacting with the pentoxide to form a trioxide dielectric filling such pin holes.
|
