| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint method that is advantageous in highly efficiently determining an application condition of an imprint material.SOLUTION: An imprint method for forming a pattern of an imprint material on a substrate includes: an application step of applying a droplet of the imprint material on the substrate; an observation step of observing the droplet applied in the application step; an information acquisition step of acquiring information on a Newton ring of the droplet and information on a diameter of the droplet from an observation result having been acquired in the observation step; and a condition determination step of determining an application condition of the imprint material in forming the pattern, on the basis of the information having been acquired in the information acquisition step. |
