| 摘要 |
PROBLEM TO BE SOLVED: To obtain a sectional shape, suitable for optical performance evaluation, of an object of measurement without having to cause a probe to scan the object of measurement all over.SOLUTION: A controller acquires surface shape data of an object of measurement in the circumferential direction (S1), and calculates the difference between each point of the acquired circumferential shape and a point shifted by a random angle to prepare difference data (S2). Using the prepared difference data, it identifies the position of the object of measurement having large axially asymmetric components (S3), and prepares a scanning route for section measurement (S4). Then, by conducting probe measurement on the basis of the scanning route for section measurement, it acquires surface shape data for section measurement (S5). Thus, as the probe is caused to conduct scanning by identifying a linear shaped scanning route the displacement extent of whose surface increases on the basis of the surface shape data in the circumferential direction, the sectional shape of the object of measurement appropriate for optical performance evaluation can be acquired in a short period of time. |
