MICROSCOPE SYSTEM, CALIBRATION METHOD, AND HEIGHT MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique for easily calibrating a scanning type probe microscope without damaging a specimen.SOLUTION: A microscope system 100 includes a microscope device 400 and an arithmetic unit 700. The microscope device 400 includes an optical microscope 200 and an SPM 300. Based on first height information of a specimen S obtained by height measurement by the optical microscope 200 and a correction value for each height of an object which is obtained in advance for correcting a measurement error generated by the height measurement by the SPM 300, the arithmetic unit 700 determines the correction value used in the height measurement by the SPM 300.