| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor device capable of performing excellent temperature compensation, and also to provide an altimeter, an electronic apparatus and a mobile body.SOLUTION: A pressure sensor device 1 includes: a pressure sensor 1 which has a pressure receiving surface 541 and is equipped with a bendable and deformable diaphragm 54; and a temperature sensor 411 which is separated from the diaphragm 54 and arranged on the pressure receiving surface 541 side of the diaphragm 54. Moreover, the pressure sensor 1 has a cavity part which is a pressure reference chamber on the surface side opposite the pressure receiving surface 541 of the diaphragm 54. |
