| 摘要 |
PROBLEM TO BE SOLVED: To reduce a magnetic field leaking in the horizontal direction from a magnet used for supporting the vertical direction.SOLUTION: A stage device includes magnets LVMM1, LVMM2, a moving body floating by means of the magnets LVMM1, LVMM2, and moving in a first direction along a horizontal plane, together with the magnets LVMM1, LVMM2, and a fixing member LVS having a magnetic material LVSS facing above the magnets LVMM1, LVMM2 in the range of motion of the movable body. Side faces of the magnets LVMM1, LVMM2 in at least the first direction are covered by using the first magnetic field shielding surface 10 of the movable body, and the second magnetic field shielding surface 20 of the fixing member LVS. |
