发明名称 CASE CLEANING JIG
摘要 PROBLEM TO BE SOLVED: To provide a case cleaning jig that can adjust the radiation angle of cleaning solution.SOLUTION: A carrier 1 and a water pumping board 2 disposed on the carrier 1 are provided. The water pumping board 2 has an upper case 21 and a lower case 22 which are mutually combined with each other. The upper case 21 has a suction port 211 and at least a water pumping hole 212 formed at the peripheral edge of the outer diameter of the upper case 21. When the above member construction is disposed in a cleaning groove, cleaning solution infiltrates from the suction port 211 into the water pumping board 2, the cleaning solution in the water pumping board 2 is discharged from the water pumping hole 212 at a predetermined angle by centrifugal force occurring when the water pumping board 2 is rotated by external force, whereby the groove wall of the cleaning groove is cleaned and residual materials can be prevented from being accumulated on the groove wall of the cleaning groove.
申请公布号 JP2016005000(A) 申请公布日期 2016.01.12
申请号 JP20150115763 申请日期 2015.06.08
申请人 LAI CHUN-LIANG 发明人 LAI CHUN-LIANG
分类号 H01L21/304;H01L21/683 主分类号 H01L21/304
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