发明名称 |
Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus |
摘要 |
An electrostatic chuck, a thin film deposition apparatus including the electrostatic chuck, and a method of manufacturing an organic light emitting display apparatus using the thin film deposition apparatus. The electrostatic chuck includes: a first plate; a first common wire disposed on the first plate and electrically connected to a plus terminal of an electric power source; first electrode patterns electrically connected to the first common wire, separated by a distance from each other, and extending from the first common wire; a second common wire disposed on the first plate and electrically connected to a minus terminal of the electric power source; second electrode patterns electrically connected to the second common wire, separated by a distance from each other, and extending from the second common wire; a first additional wire electrically connected to the first common wire; and a second additional wire electrically connected to the second common wire. |
申请公布号 |
US9234270(B2) |
申请公布日期 |
2016.01.12 |
申请号 |
US201213466886 |
申请日期 |
2012.05.08 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
Choi Young-Mook;Kim Jong-Heon;Kim Mu-Hyun;Choi Beohm Rock |
分类号 |
B05D5/12;C23C14/24;H01J9/22;C23C14/50;H01L21/67;H01L21/683 |
主分类号 |
B05D5/12 |
代理机构 |
Christie, Parker & Hale, LLP |
代理人 |
Christie, Parker & Hale, LLP |
主权项 |
1. A method of manufacturing an organic light emitting display apparatus, the method comprising:
disposing a substrate on an electrostatic chuck which comprises: a first plate; a first common wire disposed on the first plate and electrically connected to a plus (+) terminal of an electric power source; a plurality of first electrode patterns electrically connected to the first common wire between a first end and a second end of the first common wire, separated by a distance from each other, and extending from the first common wire; a second common wire disposed on the first plate and electrically connected to a minus (−) terminal of the electric power source; a plurality of second electrode patterns electrically connected to the second common wire, separated by a distance from each other, and extending from the second common wire; a first additional wire electrically connected to the first common wire at the first end and at the second end; and a second additional wire electrically connected to the second common wire; conveying the electrostatic chuck on which the substrate is disposed to pass through a plurality of chambers that are maintained in a vacuum state; and forming an organic layer on the substrate by using a thin film deposition assembly disposed in at least one of the chambers, by a movement of the electrostatic chuck or the thin film deposition assembly with respect to the other, wherein the thin film deposition assembly comprises a pattering slit sheet smaller than the substrate in a direction parallel to a side of the substrate on which the organic layer is formed. |
地址 |
Yongin-si KR |