| 摘要 |
A collector assembly which is used with a spin chuck includes a base component, an upper component, and a first intermediate component which is configured to be fitted between the base component and the upper component. The base component, the upper component, and the first intermediate component are configured to be intercoupled to form a process enclosure, and are configured to be separated from one another. The base component and the first intermediate individually include collector wall segments, and the collector wall segments constitute an outer wall of the collector assembly together while the base component, the upper component, and the first intermediate component are interfitted. |
