| 发明名称 | Fin contacted electrostatic discharge (ESD) devices with improved heat distribution | ||
| 摘要 | Fin contacted electrostatic discharge (ESD) devices with improved heat distribution and methods of manufacture are disclosed. The method includes forming a plurality of fins on a substrate which is aligned with at least one well region in the substrate. The method further includes forming at least one electrostatic discharge (ESD) device spanning two or more of the plurality of fins. The forming of the ESD device includes forming an epitaxial material spanning the two or more of the plurality of fins and forming one or more contacts on the epitaxial material. | ||
| 申请公布号 | US9236374(B2) | 申请公布日期 | 2016.01.12 |
| 申请号 | US201414146421 | 申请日期 | 2014.01.02 |
| 申请人 | GLOBALFOUNDRIES INC. | 发明人 | Campi, Jr. John B.;Gauthier, Jr. Robert J.;Mishra Rahul;Mitra Souvick;Muhammad Mujahid |
| 分类号 | H01L21/8238;H01L27/02;H01L29/66;H01L23/367 | 主分类号 | H01L21/8238 |
| 代理机构 | Roberts Mlotkowski Safran & Cole, P.C. | 代理人 | LeStrange Michael;Calderon Andrew M.;Roberts Mlotkowski Safran & Cole, P.C. |
| 主权项 | 1. A method comprising: forming a plurality of fins on a substrate comprising at least a pair of P+ fins and at least a pair of N+ fins which are aligned with at least one well region in the substrate; and forming at least one electrostatic discharge (ESD) device spanning two or more of the plurality of fins, wherein the forming of the ESD device comprises: forming an epitaxial material spanning the two or more of the plurality of fins; andforming one or more contacts on the epitaxial material. | ||
| 地址 | Grand Cayman KY | ||