Linear actuator and vacuum control device

摘要

A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.

主权项

1. A linear actuator for use with a vacuum chamber in which plasma is generated, comprising
a moving member which extends between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber and which is configured to be rectilinearly reciprocated; a drive section which is configured to reciprocate the moving member; a cover for covering the moving member; and a slide seal section for providing a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon; wherein the cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber in the course of reciprocation of the moving member by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.