| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique which allows for relatively flexible setting of the thickness of a vibrating membrane, even if the height of a cavity in a cell of a capacitance transducer is large, while increasing the degree of design freedom of the cell structure.SOLUTION: In a method for manufacturing a capacitance transducer having a cell of a structure including a first electrode 3, and a vibration membrane including a second electrode 6 provided while sandwiching the first electrode 3 and a cavity 5, a first sacrificial layer 12 is formed on the first electrode 3. A second sacrificial layer is formed at a part corresponding to a part of the cavity 5 on the first sacrificial layer 12, and an isolating layer 11 forming a part of the vibration membrane is formed on the second sacrificial layer. The second sacrificial layer is removed through an opening 8 formed in the isolating layer 11, and then the first sacrificial layer 12 is removed. |
