Apparatus and method for measuring dielectric constant

摘要

Provided are an apparatus and method for measuring a dielectric constant. The apparatus includes a cavity resonator including a cavity therein, an insertion hole penetrating through the cavity vertically and in which a sample is inserted, and grooves symmetrically formed with respect to the cavity in the insertion hole, a network analyzer configured to generate an electromagnetic signal supplied to the cavity resonator, receive an electromagnetic signal passed through the cavity resonator, and calculate a scattering parameter, a transmission means configured to supply the generated electromagnetic signal to the cavity resonator, a reception means configured to supply the electromagnetic signal passed through the cavity resonator to the network analyzer, and a calculation processor configured to receive the scattering parameter from the network analyzer and calculate a dielectric constant of the sample.

主权项

1. An apparatus for measuring a dielectric constant, comprising:
a cavity resonator including a cavity therein, an insertion hole penetrating through the cavity vertically and in which a sample is inserted, and grooves symmetrically formed with respect to the cavity in the insertion hole; a network analyzer configured to generate an electromagnetic signal supplied to the cavity resonator, receive an electromagnetic signal passed through the cavity resonator, and calculate a scattering parameter; a transmission means configured to supply the generated electromagnetic signal to the cavity resonator; a reception means configured to supply the electromagnetic signal passed through the cavity resonator to the network analyzer; and a calculation processor configured to receive the scattering parameter from the network analyzer, and calculate a dielectric constant of the sample; wherein the calculation processor calculates the dielectric constant of the sample using the following equations:f-f0f=-∫Vs⁢(ɛr′-1)⁢ɛ0⁢E_·E_0o⁢⁢ⅆv∫Vo⁢(ɛo⁢E_·E_0o⁢+μ0⁢H_·H_0o)⁢ⅆv=-(ɛr′-1)⁢A12⁢(1Q-1Q0)=∫Vs⁢ɛr″⁢ɛ0⁢E_·E_0o⁢⁢ⅆv∫Vo⁢(ɛo⁢E_·E_0o⁢+μ0⁢H_·H_0o)⁢ⅆv=ɛr″⁢B where ω=2πf, δω=ω−ω0, ω0=2πf0, Ē″0 and H″0 denote electromagnetic fields before sample insertion, Ē and H denote electromagnetic fields after the sample insertion, εr denotes a dielectric constant of the sample, f denotes a resonant frequency after the sample is inserted in the cavity resonator, f0 denotes a resonant frequency of the cavity resonator before the sample insertion, ε0 denotes a dielectric constant of free space (8.854×10−12 F/m), and μ0 denotes a permeability of free space (4π×10−7 H/m).