Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology

摘要

An integrated capacitive-type humidity sensor formed in a semiconductor chip integrating a sensing capacitor and a reference capacitor. Each of the sensing and reference capacitors have at least a first electrode and at least a second electrode, the first and second electrodes of each of the sensing and reference capacitors being arranged at distance and mutually insulated. A hygroscopic layer extends on the sensing and reference capacitors and a conductive shielding region extends on the reference capacitor but not on the sensing capacitor.

主权项

1. A humidity sensor, comprising:
a semiconductor chip; a sensing capacitor and a reference capacitor integrated in the semiconductor chip, each of the sensing and reference capacitors having a first electrode and a second electrode, the first and second electrodes of each of the sensing and reference capacitors being arranged at a distance from each other and mutually insulated; a hygroscopic layer over the sensing and reference capacitors; and a conductive shielding region over the reference capacitor and between the hygroscopic layer and the reference capacitor and not over the sensing capacitor.