发明名称 Movable range adjusting mechanism for workpiece conveying device
摘要 The present invention enables adjustment of a motion range of a workpiece conveying mechanism by a simple configuration. Provided is a workpiece conveying device including a simple motion range adjusting mechanism for conveying workpieces of different sizes. According to one embodiment of the invention, the workpiece conveying device for conveying workpieces includes a workpiece holding mechanism configured to operate to hold and release the workpiece. The workpiece conveying device also includes an actuator equipped with a movable member directly or indirectly connected to the workpiece holding mechanism to drive the workpiece holding mechanism. The workpiece conveying device further includes a stopper device having a male member and a female member, and these male member and female member are configured to engage with each other in at least two different arrangements, thereby defining at least two predefined discontinuous holding positions of the workpiece holding mechanism connected to the movable member.
申请公布号 US9236285(B2) 申请公布日期 2016.01.12
申请号 US201313901255 申请日期 2013.05.23
申请人 EBARA CORPORATION 发明人 Nishida Hiroaki
分类号 H01L21/67;H01L21/687;H01L21/677 主分类号 H01L21/67
代理机构 Pearne & Gordon LLP 代理人 Pearne & Gordon LLP
主权项 1. A workpiece conveying device for conveying a workpiece, comprising: a workpiece holding mechanism configured to operate so as to hold and release the workpiece; an actuator equipped with a movable member directly or indirectly connected to the workpiece holding mechanism in order to drive the workpiece holding mechanism over a movable range; and a stopper device having a male member and a female member, at least one of the male member and the female member having a stopper surface, the stopper surface limiting the movable range of the workpiece holding mechanism when the stopper surface contacts with the workpiece holding mechanism, wherein the male member and the female member are configured to engage with each other in at least a first arrangement and a second arrangement, wherein in the first arrangement, the stopper surface limits the movable range of the workpiece holding mechanism to a first end position such that when the workpiece holding mechanism is moved to the first end position and contacts the stopper surface, the workpiece holding mechanism is in a first predefined discontinuous holding position, and wherein in the second arrangement, the stopper surface limits the movable range of the workpiece holding mechanism to a second end position that is different from the first end position such that when the workpiece holding mechanism is moved to the second end position and contacts the stopper surface, the workpiece holding mechanism is in a second predefined discontinuous holding position.
地址 Tokyo JP